SE EEDF MEASUREMENTS

--Ar on metallic Ti--
	
ion energy (eV)	500eV
electron energy (eV)	SE EEDF(e-/ion/eV)
-50	0
-40	0
-30	0
-20	-9.96678E-5
-10	2.99003E-4
0	9.63455E-4
10	0.00136
15	5.98007E-4
20	-1.99336E-4
25	-1.99336E-4
30	5.98007E-4
35	0.00193
40	0.00193
45	5.98007E-4
50	-1.99336E-4
55	0
60	0
65	0
70	0
75	0
80	0

ion energy (eV)	800eV
electron energy (eV)	SE EEDF(e-/ion/eV)
-50	3.55271E-17
-40	1.77636E-17
-30	-5.35714E-5
-20	-5.35714E-5
-10	0.00116
0	0.00259
10	0.00304
15	0.00118
20	-4.28571E-4
25	0
30	-1.07143E-4
35	3.21429E-4
40	0.00104
45	8.21429E-4
50	8.57143E-4
55	0.00229
60	0.003
65	0.002
70	0.00114
75	7.14286E-4
80	9.64286E-4
85	0.00196
90	0.00207
95	6.42857E-4
100	-2.14286E-4
110	0
120	0
130	0
140	-1.77636E-17
150	-3.55271E-17

ion energy (eV)	1000eV
electron energy (eV)	SE EEDF(e-/ion/eV)
-50	-2.78644E-17
-40	-2.78644E-17
-30	-8.40336E-5
-20	1.68067E-4
-10	0.001
0	0.00181
10	0.00228
15	0.00155
20	2.10084E-4
25	-1.2605E-4
30	0
35	-1.2605E-4
40	3.78151E-4
45	0.00113
50	0.0013
55	0.00169
60	0.00223
65	0.00196
70	0.00174
75	0.00202
80	0.00263
85	0.00286
90	0.00227
95	7.56303E-4
100	-2.52101E-4
110	0
120	0
130	6.96611E-18
140	6.96611E-18
150	0

ion energy (eV)	2000eV
electron energy (eV)	SE EEDF(e-/ion/eV)
-50	-4.57875E-4
-40	-2.28938E-4
-30	2.28938E-4
-20	7.78388E-4
-10	0.00101
0	0.00128
10	0.00165
20	0.00128
30	8.24176E-4
40	5.49451E-4
50	9.15751E-4
60	0.00275
70	0.00421
80	0.00449
90	0.00375
100	0.00201
110	9.15751E-4
120	5.95238E-4
130	2.28938E-4
140	-2.28938E-4
150	-4.57875E-4

--Ar on TiOx--

ion energy (eV)	500eV
electron energy (eV)	SE EEDF(e-/ion/eV)
-50	3.34373E-17
-40	1.67187E-17
-30	0
-20	-1.0084E-4
-10	2.52101E-4
0	0.00108
10	0.00151
20	0.00158
30	0.00151
40	0.00108
50	2.52101E-4
60	-1.0084E-4
70	-8.35933E-18
80	0

ion energy (eV)	2000eV
electron energy (eV)	SE EEDF(e-/ion/eV)
-50	0
-40	0
-30	-3.42857E-4
-20	0.00103
-10	0.00331
0	0.00331
10	6.85714E-4
15	-6.85714E-4
20	0
25	0
30	0
35	0
40	0
45	-2.05714E-4
50	3.42857E-4
55	0.00281
60	0.00443
65	0.00368
70	0.00274
75	0.00514
80	0.00656
85	0.0069
90	0.00821
95	0.00855
100	0.00759
105	0.00745
110	0.00832
115	0.0056
120	0.00194
125	6.85714E-5
130	-1.37143E-4
140	0
150	0
------------------------------------
SE EEDF MODELING
Extended Hagstrum model
-- Ar on TiOx--
ion energy 1000eV
Pt,33 = 0.02 and Pt,58 = 0.1.
electron energy (eV)	escape probability	SE EEDF inside (e-/ion/eV)	SE EEDF outside (e-/ion/eV)	SE EEDF outside (e-/ion/eV) after Gaussian convolution with width = 8eV
-12.50333	0	0	0	4.73433E-4
-11.83667	0	0	0	5.52227E-4
-11.17	0	0	0	6.39801E-4
-10.50333	0	0	0	7.36275E-4
-9.83667	0	0	0	8.41594E-4
-9.17	0	0	0	9.55508E-4
-8.50333	0	0	0	0.00108
-7.83667	0	0	0	0.00121
-7.17	0	0	0	0.00134
-6.50333	0	0	0	0.00148
-5.83667	0	0	0	0.00163
-5.17	0	0	0	0.00178
-4.50333	0	0	0	0.00192
-3.83667	0.07649	0	0	0.00207
-3.17	0.09347	0	0	0.00221
-2.50333	0.11133	0	0	0.00235
-1.83667	0.12206	0	0	0.00247
-1.17	0.12837	0	0	0.00259
-0.50333	0.13126	0	0	0.00269
0.16333	0.13106	0.01207	0.00158	0.00278
0.83	0.12793	0.05521	0.00706	0.00285
1.49667	0.12193	0.09056	0.01104	0.00291
2.16333	0.11307	0.12007	0.01358	0.00295
2.83	0.10136	0.14511	0.01471	0.00296
3.49667	0.08677	0.16662	0.01446	0.00296
4.16333	0.06928	0.18532	0.01284	0.00293
4.83	0.04886	0.20173	0.00986	0.00289
5.49667	0.02545	0.21625	0.0055	0.00283
6.16333	0	0.2292	0	0.00275
6.83	0	0.24083	0	0.00266
7.49667	0	0.25134	0	0.00255
8.16333	0	0.26087	0	0.00243
8.83	0	0.26957	0	0.0023
9.49667	0	0.27754	0	0.00216
10.16333	0	0.28487	0	0.00202
10.83	0	0.29164	0	0.00188
11.49667	0	0.29792	0	0.00173
12.16333	0	0.30374	0	0.00159
12.83	0	0.30918	0	0.00144
13.49667	0	0.31425	0	0.00131
14.16333	0	0.31901	0	0.00118
14.83	0	0.32347	0	0.00106
15.49667	0	0.32767	0	9.41055E-4
16.16333	0	0.33163	0	8.35875E-4
16.83	0	0.33537	0	7.39863E-4
17.49667	0	0.33891	0	6.53647E-4
18.16333	0	0.34226	0	5.77109E-4
18.83	0	0.34544	0	5.10129E-4
19.49667	0	0.34847	0	4.52454E-4
20.16333	0	0.35135	0	4.03675E-4
20.83	0	0.3541	0	3.63288E-4
21.49667	0	0.35672	0	3.30714E-4
22.16333	0	0.35923	0	3.05319E-4
22.83	0	0.36162	0	2.86436E-4
23.49667	0	0.36392	0	2.73381E-4
24.16333	2.50566E-10	0.36612	9.17368E-11	2.65461E-4
24.83	1.02204E-5	0.36823	3.76347E-6	2.58938E-4
25.49667	4.10338E-5	0.37026	1.51932E-5	2.5587E-4
26.16333	9.29637E-5	0.37221	3.46021E-5	2.60774E-4
26.83	1.66525E-4	0.37409	6.2295E-5	2.58608E-4
27.49667	2.62224E-4	0.3759	9.85689E-5	2.64343E-4
28.16333	3.80557E-4	0.37764	1.43713E-4	2.77205E-4
28.83	5.22018E-4	0.37932	1.98012E-4	2.83075E-4
29.49667	6.87087E-4	0.38094	2.61741E-4	2.96152E-4
30.16333	8.76239E-4	0.38251	3.3517E-4	3.10333E-4
30.83	0.00109	0.38403	4.18566E-4	3.2395E-4
31.49667	0.00133	0.38549	5.12189E-4	3.37317E-4
32.16333	0.00159	0.38691	6.16292E-4	3.4807E-4
32.83	0.00188	0.38828	7.31126E-4	3.58499E-4
33.49667	0.00211	0.38961	8.22079E-4	3.69235E-4
34.16333	0.00221	0.39091	8.65282E-4	3.76332E-4
34.83	0.00225	0.39216	8.82029E-4	3.84014E-4
35.49667	0.00223	0.39337	8.77514E-4	3.92766E-4
36.16333	0.00216	0.39455	8.54178E-4	3.97563E-4
36.83	0.00206	0.3957	8.13409E-4	4.0389E-4
37.49667	0.00191	0.39681	7.5605E-4	4.11973E-4
38.16333	0.00172	0.3979	6.82647E-4	4.17282E-4
38.83	0.00149	0.39895	5.93549E-4	4.25159E-4
39.49667	0.00122	0.39998	4.88976E-4	4.35671E-4
40.16333	9.20402E-4	0.40098	3.69062E-4	4.45587E-4
40.83	5.81844E-4	0.40195	2.33874E-4	4.59127E-4
41.49667	2.07077E-4	0.4029	8.34318E-5	4.76126E-4
42.16333	0	0.40383	0	4.95311E-4
42.83	0	0.40473	0	5.18855E-4
43.49667	0	0.40561	0	5.46542E-4
44.16333	0	0.40647	0	5.79068E-4
44.83	0	0.40731	0	6.1676E-4
45.49667	0	0.40813	0	6.59847E-4
46.16333	0	0.40893	0	7.08449E-4
46.83	0	0.40971	0	7.62566E-4
47.49667	0	0.41048	0	8.22063E-4
48.16333	0	0.41122	0	8.86665E-4
48.83	0	0.41195	0	9.55954E-4
49.49667	1.34152E-5	0.41267	5.53604E-6	0.00103
50.16333	1.19779E-4	0.41337	4.95129E-5	0.00111
50.83	3.33578E-4	0.41406	1.3812E-4	0.00119
51.49666	6.56458E-4	0.41473	2.72251E-4	0.00127
52.16334	0.00109	0.41538	4.52794E-4	0.00135
52.83	0.00164	0.41603	6.80616E-4	0.00143
53.49666	0.0023	0.41666	9.56584E-4	0.00151
54.16334	0.00307	0.41728	0.00128	0.00158
54.83	0.00396	0.41789	0.00166	0.00166
55.49666	0.00497	0.41848	0.00208	0.00172
56.16334	0.00611	0.41906	0.00256	0.00178
56.83	0.00736	0.41964	0.00309	0.00183
57.49666	0.00874	0.4202	0.00367	0.00187
58.16334	0.01015	0.42075	0.00427	0.00191
58.83	0.01088	0.42129	0.00458	0.00193
59.49666	0.01119	0.42182	0.00472	0.00194
60.16334	0.0112	0.42235	0.00473	0.00194
60.83	0.01096	0.42286	0.00464	0.00193
61.49666	0.0105	0.42336	0.00445	0.00191
62.16334	0.00983	0.42386	0.00417	0.00187
62.83	0.00897	0.42434	0.00381	0.00183
63.49666	0.00792	0.42482	0.00337	0.00178
64.16334	0.00669	0.42529	0.00285	0.00172
64.83	0.00528	0.42576	0.00225	0.00165
65.49666	0.0037	0.42621	0.00158	0.00157
66.16334	0.00195	0.42666	8.32658E-4	0.00149
66.83	3.01064E-5	0.4271	1.28584E-5	0.00141
67.49666	0	0.42753	0	0.00132
68.16334	0	0.42796	0	0.00123
68.83	0	0.42838	0	0.00114
69.49666	0	0.42879	0	0.00105
70.16334	0	0.4292	0	9.57162E-4
70.83	0	0.4296	0	8.70225E-4
71.49666	0	0.42999	0	7.86378E-4
72.16334	0	0.43038	0	7.06282E-4
72.83	0	0.43076	0	6.30476E-4
73.49666	0	0.43114	0	5.59367E-4
74.16334	0	0.43151	0	4.93218E-4
74.83	0	0.43188	0	4.32193E-4
75.49666	0	0.43224	0	3.76338E-4
76.16334	0	0.43259	0	3.2561E-4
76.83	0	0.43294	0	2.79887E-4
77.49666	0	0.43329	0	2.38976E-4
78.16334	0	0.43363	0	2.0263E-4
78.83	0	0.43397	0	1.70561E-4
79.49666	0	0.4343	0	1.42451E-4
80.16334	0	0.43463	0	1.17964E-4
80.83	0	0.43495	0	9.67574E-5
81.49666	0	0.43527	0	7.84892E-5
82.16334	0	0.43558	0	6.2838E-5
82.83	0	0.43589	0	4.96086E-5
83.49666	0	0.4362	0	3.85548E-5
84.16334	0	0.4365	0	2.94211E-5
84.83	0	0.4368	0	2.19631E-5
85.49666	0	0.43709	0	1.59546E-5
86.16334	0	0.43739	0	1.11902E-5
86.83	0	0.43767	0	7.48766E-6
87.49666	0	0.43796	0	4.68648E-6
88.16334	0	0.43824	0	2.6478E-6
88.83	0	0.43851	0	1.25265E-6
89.49666	0	0.43879	0	4.00234E-7
90.16334	0	0.43906	0	6.06168E-9
90.83	0	0.43932	0	0
91.49666	0	0.43959	0	0
92.16334	0	0.43985	0	0
92.83	0	0.44011	0	0
93.49666	0	0.44036	0	0
94.16334	0	0.44061	0	0
94.83	0	0.44086	0	0
95.49666	0	0.44111	0	0
96.16334	0	0.44135	0	0
96.83	0	0.44159	0	0
97.49666	0	0.44183	0	0
98.16334	0	0.44206	0	0
98.83	0	0.4423	0	0
99.49666	0	0.44252	0	0
100.16334	0	0.44275	0	0
100.83	0	0.44298	0	0
101.49666	0	0.4432	0	0
102.16334	0	0.44342	0	0
102.83	0	0.44364	0	0
103.49666	0	0.44385	0	0
104.16334	0	0.44407	0	0
104.83	0	0.44428	0	0
105.49666	0	0.44449	0	0
106.16334	0	0.44469	0	0
106.83	0	0.4449	0	0
107.49666	0	0.4451	0	0
108.16334	0	0.4453	0	0
108.83	0	0.4455	0	0
109.49666	0	0.4457	0	0
110.16334	0	0.44589	0	0
110.83	0	0.44608	0	0
111.49666	0	0.44628	0	0
112.16334	0	0.44646	0	0
112.83	0	0.44665	0	0
113.49666	0	0.44684	0	0
114.16334	0	0.44702	0	0
114.83	0	0.4472	0	0
115.49667	0	0.44738	0	0
116.16333	0	0.44756	0	0
116.83	0	0.44774	0	0
117.49667	0	0.44791	0	0
118.16333	0	0.44809	0	0
118.83	0	0.44826	0	0
119.49667	0	0.44843	0	0
120.16333	0	0.4486	0	0
120.83	0	0.44877	0	0
121.49667	0	0.44893	0	0
122.16333	0	0.4491	0	0
122.83	0	0.44926	0	0
123.49667	0	0.44942	0	0
124.16333	0	0.44958	0	0
124.83	0	0.44974	0	0
125.49667	0	0.4499	0	0
126.16333	0	0.45005	0	0
126.83	0	0.45021	0	0
127.49667	0	0.45036	0	0
128.16333	0	0.45051	0	0
128.83	0	0.45066	0	0
129.49667	0	0.45081	0	0
130.16333	0	0.45096	0	0
130.83	0	0.45111	0	0
131.49667	0	0.45125	0	0
132.16333	0	0.4514	0	0
132.83	0	0.45154	0	0
133.49667	0	0.45168	0	0
134.16333	0	0.45182	0	0
134.83	0	0.45196	0	0
135.49667	0	0.4521	0	0
136.16333	0	0.45224	0	0
136.83	0	0.45238	0	0
137.49667	0	0.45251	0	0
138.16333	0	0.45265	0	0
138.83	0	0.45278	0	0
139.49667	0	0.45291	0	0
140.16333	0	0.45305	0	0
140.83	0	0.45318	0	0
141.49667	0	0.4533	0	0
142.16333	0	0.45343	0	0
142.83	0	0.45356	0	0
143.49667	0	0.45369	0	0
144.16333	0	0.45381	0	0
144.83	0	0.45394	0	0
145.49667	0	0.45406	0	0
146.16333	0	0.45418	0	0
146.83	0	0.4543	0	0
147.49667	0	0.45443	0	0
148.16333	0	0.45455	0	0
148.83	0	0.45466	0	0
149.49667	0	0.45478	0	0
150.16333	0	0.4549	0	0
150.83	0	0.45502	0	0
151.49667	0	0.45513	0	0
152.16333	0	0.45525	0	0
152.83	0	0.45536	0	0
153.49667	0	0.45547	0	0
154.16333	0	0.45559	0	0
154.83	0	0.4557	0	0
155.49667	0	0.45581	0	0
156.16333	0	0.45592	0	0
156.83	0	0.45603	0	0
157.49667	0	0.45614	0	0
158.16333	0	0.45625	0	0
158.83	0	0.45635	0	0
159.49667	0	0.45646	0	0
160.16333	0	0.45656	0	0
160.83	0	0.45667	0	0
161.49667	0	0.45677	0	0
162.16333	0	0.45688	0	0
162.83	0	0.45698	0	0
163.49667	0	0.45708	0	0
164.16333	0	0.45718	0	0
164.83	0	0.45728	0	0
165.49667	0	0.45738	0	0
166.16333	0	0.45748	0	0
166.83	0	0.45758	0	0
167.49667	0	0.45768	0	0
168.16333	0	0.45778	0	0
168.83	0	0.45788	0	0
169.49667	0	0.45797	0	0
170.16333	0	0.45807	0	0
170.83	0	0.45816	0	0
171.49667	0	0.45826	0	0
172.16333	0	0.45835	0	0
172.83	0	0.45844	0	0
173.49667	0	0.45854	0	0
174.16333	0	0.45863	0	0
174.83	0	0.45872	0	0
175.49667	0	0.45881	0	0
176.16333	0	0.4589	0	0
176.83	0	0.45899	0	0
177.49667	0	0.45908	0	0
178.16333	0	0.45917	0	0
178.83	0	0.45926	0	0
179.49667	0	0.45935	0	0
180.16333	0	0.45943	0	0
180.83	0	0.45952	0	0
181.49667	0	0.45961	0	0
182.16333	0	0.45969	0	0
182.83	0	0.45978	0	0
183.49667	0	0.45986	0	0
184.16333	0	0.45995	0	0
184.83	0	0.46003	0	0
185.49667	0	0.46011	0	0
186.16333	0	0.4602	0	0
186.83	0	0.46028	0	0
